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Micromachined 60 GHz Air-filled Interdigital Bandpass Filter

Wang, Yi and Ke, M. and Lancaster, M.J. (2009) Micromachined 60 GHz Air-filled Interdigital Bandpass Filter. In: International Workshop on Microwave Filters, 16-18 November 2009, CNES, Toulouse, France.

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A 4-pole interdigital filter has been demonstrated at 60 GHz with a bandwidth of 10%, it is made using micromachining and a multi-layer bonding. The filter is an airfilled three-dimensional structure. It is formed of five layers which are bonded together. Each layer is micromachined SU-8 based, 200-μm thick, and finished with 1.5 μm gold coating. The resonators are thick stripline-like and enclosed in a cavity. The input and output are transitions from a coplanar structure to a rectangular coaxial line, which are then coupled into the cavity. The filter is only 3.7 mm by 2.0 mm in size and 1.0 mm in height. The measured insertion loss is 1.1 dB and the return loss is below -9 dB. The bandwidth of the tested filter is broadened due to fabrication imperfections, which have been identified by modelling and discussed in the paper.

Type of Work:Conference or Workshop Item
Date:16 November 2009 (Publication)
School/Faculty:Colleges (2008 onwards) > College of Engineering & Physical Sciences
Department:Electronic, Electrical and Computer Engineering
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Subjects:TK Electrical engineering. Electronics Nuclear engineering
Institution:University of Birmingham
Copyright Holders:authors
ID Code:274
Refereed:YES
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